[18p-A31-1~19] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[18p-A31-5] Surface Reactions during Atomic Layer Etching of Platinum by Oxygen Plasma and Formic Acid Vapor

〇Kazuhiro Miwa¹, T.T.Nga Nguyen¹, Daijiro Akagi², Takeshi Okato², Masaru Hori¹, Kenji Ishikawa¹ (1.Nagoya Univ., 2.AGC Inc.)

Keywords:

Atomic Layer Etching,Noble Metal