[18p-A36-1~11] Application of Advanced Ion/Electron Microscopy for Future Nanoscale Materials and Devices

1:45 PM - 2:15 PM JST(4:45 AM - 5:15 AM UTC)English Presentation

[18p-A36-2] From Dual Damascene to Semi-Damascene and new materials: opportunities for characterization in interconnects

〇Zsolt Tokei¹ (1.IMEC)

Keywords:

Local interconnect,new conductor,characterization