[18p-A36-1~11] Application of Advanced Ion/Electron Microscopy for Future Nanoscale Materials and Devices

13:45 〜 14:15英語発表

[18p-A36-2] From Dual Damascene to Semi-Damascene and new materials: opportunities for characterization in interconnects

〇Zsolt Tokei¹ (1.IMEC)

キーワード：

Local interconnect、new conductor、characterization