[18p-B3-1~12] CS.7 Code-sharing Session of 6.1 & 13.3 & 13.5

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[18p-B3-5] Ferroelectricity disappearance in ultra-thin HfO₂ capacitor

〇Akira Toriumi¹, Shinji Migita² (1.Free Engineer, 2.AIST)

Keywords:

ferroelectric HfO2

It is discussed that the remanent polarization of ferroelectric HfO₂ is sharply reduced in ultra-thin region.