Presentation Information

[18p-C42-2]Toward wafer-scale integrated circuit technology using two-dimensional materials

〇Kosuke Nagashio1 (1.UTokyo)

Keywords:

2 dimensional materials,MoS2,transistor

In this presentation, I introduce the recent results on top gate MoS2 FET on sapphire substrate, where MoS2 has been grown using MOCVD by Sakuma@NIMS. By clarifying the current status and issues of FET performance on sapphire substrates, we would like to discuss future prospects.

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