[19a-A23-1~5] Advancements in Junction Technologies and Cutting-Edge Si-LSIs: Past, Present, and Future

9:30 AM - 10:25 AM JST(12:30 AM - 1:25 AM UTC)

[19a-A23-3] Junction Technologies in Advanced Logic LSIs

〇Hitoshi Wakabayashi¹ (1.IIR, Tokyo Tech)

Keywords:

Semiconductor,Junction

Junction Technologies in Advanced Logic LSIs are going to be discussed.