The 85th JSAP Autumn Meeting 2024
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Session Details

Symposium (Oral)Symposium : Advancements in Junction Technologies and Cutting-Edge Si-LSIs: Past, Present, and Future

[19a-A23-1~5]Advancements in Junction Technologies and Cutting-Edge Si-LSIs: Past, Present, and Future

Thu. Sep 19, 2024 9:00 AM - 11:55 AM JST
Thu. Sep 19, 2024 12:00 AM - 2:55 AM UTC
A23 (TOKI MESSE 2F)
Kazuo Tsutsui(Tokyo Tech), Bunji Mizuno(UJTLab)
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9:00 AM - 9:10 AM JST(12:00 AM - 12:10 AM UTC)

[19a-A23-1]Opening

〇Satoshi Shibata1 (1.Panasonic)
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9:10 AM - 9:30 AM JST(12:10 AM - 12:30 AM UTC)

[19a-A23-2]Progress of junction technology and semiconductor device

〇Hiroshi Iwai1 (1.NYCU)
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9:30 AM - 10:25 AM JST(12:30 AM - 1:25 AM UTC)

[19a-A23-3]Junction Technologies in Advanced Logic LSIs

〇Hitoshi Wakabayashi1 (1.IIR, Tokyo Tech)
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10:25 AM - 11:10 AM JST(1:25 AM - 2:10 AM UTC)

[19a-A23-4]Activation and Deactivation of High-Concentration Dopant in Silicon Crystals

〇Ichiro Mizushima1 (1.NuFlare Technology)
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11:10 AM - 11:55 AM JST(2:10 AM - 2:55 AM UTC)

[19a-A23-5]History of Ion Implantation and Plasma Doping Technology, Its Present Status, Problems

〇Masayasu Tanjo1 (1.Retired Nissin Ion)
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