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[19a-B5-9]Growth of P/Ga codoped Ge for heavily doped n-type Ge

〇(M1C)Gaku Ishizu1, Haruto Koto1, Tomo Horota1, Yasuhiko Ishikawa1, Keisuke Yamane1 (1.Toyohashi Tec)
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Keywords:

silicon photonics,n-type doping


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