[19a-C42-1~9] 15.4 III-V-group nitride crystals

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[19a-C42-5] Effect of H2 annealing on pit formation in HVPE-AlN growth on 4H-SiC(000-1)

〇Arashi Sato¹, Hisashi Murakami¹ (1.TUAT)

Keywords:

AlN,HVPE,SiC