[19p-A31-1~18] 17.3 Layered materials

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[19p-A31-4] The improvement of WSe₂ p-FET by applying sputtered Pt electrodes

〇(DC)Ryuichi Nakajima¹, Tomonori Nishimura¹, Kaito Kanahashi¹, Keiji Ueno², Yasumitsu Miyata³, Shogo Hatayama⁴, Yuta Saito^4,6, Toshihumi Irisawa⁴, Takashi Taniguchi⁵, Kenji Watanabe⁵, Kosuke Nagashio¹ (1.The Univ. of Tokyo, 2.Saitama Univ., 3.Tokyo Metropolitan Univ., 4.AIST, 5.NIMS, 6.Tohoku Univ.)

Keywords:

TMDC,Sputtering,Ozone oxidation