[19p-B1-1~16] 13.3 Insulator technology

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[19p-B1-11] Investigation of low-temperature oxidation of Ge substrates using sulfuric acid additive.

〇Hoshiki Harata¹, Gen Shimizu¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri. and Tech.)

Keywords:

MOSFET