[19p-B1-1~16] 13.3 Insulator technology

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[19p-B1-12] Preparation and evalution of GeO₂/Ge structure using CVD method.

〇Takumi Suzuki¹, Keita Ishizuka¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri. & Tech.)

Keywords:

Chemical Vapor Deposition