[19p-B3-1~22] 6.2 Carbon-based thin films

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[19p-B3-12] Fundamental investigation on the fabrication of the n-type semiconducting diamond by heavy P⁺-ion implantation

〇Yuhei Seki¹, Kaiya Imamura¹, Yasushi Hoshino¹ (1.Kanagawa Univ.)

Keywords:

ion implantation,Hall effect,Diamond semiconductor