[19p-B3-1~22] 6.2 Carbon-based thin films

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[19p-B3-3] Effect of noble gas on DLC deposition using high-power impulse magnetron sputtering

〇Shiro Matsumoto¹, Akinori Oda², Toru Harigai³, Hiroyuki Kousaka³, Takayuki Ohta¹ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:

DLC,HiPIMS,noble gas