[19p-B3-1~22] 6.2 Carbon-based thin films

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[19p-B3-4] Hydrogen free DLC synthesis by sputtering of carbonaceous industrial waste powder

〇Tomohiro Yamaguchi¹, Hiroyuki Kosaka¹, Toru Harigai¹, Yugo Suwa² (1.Gifu Univ., 2.MS Manufacturing Department)

Keywords:

DLC,sputtering