[19p-B3-1~22] 6.2 Carbon-based thin films

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[19p-B3-6] Ultra-High-Speed DLC Deposition on the Outer Surface of Cylindrical Parts Using Local Gas Injection near Discharge Electrode

〇Taketo Nagai¹, Toru Harigai¹, Akihiko Ito^1,2, Hiroyuki Kousaka¹ (1.Gifu Univ, 2.RC LOGO)

Keywords:

Diamond-like-carbon,DLC