[19p-B5-1~16] 15.5 Group IV crystals and alloys

1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[19p-B5-2] Suppression of crack propagation in strained SiGe /Ge on Si(111) by selective ion implantation

〇Ryota Mizoguchi¹, Masaki Nagao¹, Yuka Shibahara¹, Mayu Aikawa¹, Michihiro Yamada¹, Kohei Hamaya^2,3, Kentarou Sawano¹ (1.Tokyo City Univ., 2.CSRN, Osaka Univ., 3.OTRI, Osaka Univ.)

Keywords:

SiGe