[19p-C41-1~24] 13.7 Compound and power devices, process technology and characterization

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[19p-C41-8] Influences of oxidation and hydrogen etching on surface morphology of SiC(0001)

〇Shinji Kamihata¹, Takuma Kobayashi¹, Heiji Watanabe¹ (1.Osaka Univ.)

Keywords:

Silicon Carbide,surface morphology