[19p-P02-1~13] 8.1 Plasma production and diagnostics

[19p-P02-12] Observation of laser-induced fluorescence for neutral Ti particles produced by deep oscillation magnetron sputtering

〇yuuki nakagawa¹, Hiroki Kobayasi¹, Eisuke Yokoyama¹, Nobuo Nishiniya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

Keywords:

laser-induced fluorescence,magnetron sputtering

High power magnetron sputtering (HPPMS) plasmas contain neutral/ionic particles and those light emitting/non-emitting particles. The plasma diagnostics using various spectroscopic techniques, which are optical emission spectroscopy (OES) for light emitting particles, laser-induced fluorescence (LIF) spectroscopy for light non-emitting particles, laser absorption spectroscopy for light emitting/non-emitting particles, and mass spectrometry for charged particles, and have been performed for the various particles included in HPPMS plasma.
The laser-induced fluorescence (LIF) for sputtered particles produced in DOMS plasma in the deposition region was observed, and time evolution measurements for LIF were performed in the present study. As a result, a sawtooth waveform profiles were observed in the time evolution of LIF compared to the comb-like DOMS waveform of the power density. The cause of the sawtooth waveform profiles will be discussed in relation to the formation process of light non-emitting sputtered neutrals reaching the deposition region