[19p-P02-1~13] 8.1 Plasma production and diagnostics

[19p-P02-7] Pulsed control and measurement of liquid injection using high-speed piezo valve

〇Yuki Kihira¹, Yugo Nakaya¹, Takumi Moriyama¹, Keiichiro Urabe² (1.HORIBA STEC, 2.Kyoto University)

Keywords:

high-speed piezo valve,Optical emission spectroscopy

In recent years, there has been a growing demand for high-speed liquid material (precursor) supply in advanced process technologies such as atomic layer deposition (ALD). We have developed a high-speed piezoelectric valve (Electro Mechanical Valve, EMV) that enables gas flow control and high-speed pulse control. We will investigate the control of the EMV and deepen our knowledge of the plasma state change.