[19p-P02-1~13] 8.1 Plasma production and diagnostics

[19p-P02-9] Measurement of Hydrogen Atom above Polyimide irradiated by H₂ ICP

〇Shohei Nanya¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1.Meijo Univ.)

Keywords:

plasma,surface reaction,hydrogen atom

Under the irradiation of an inductively coupled hydrogen plasma, the density of hydrogen atoms above the polyimide surface was measured, and surface reactions were quantitatively analyzed. Understanding the interactions between reactive species in the plasma and the substrate surface is essential for the advanced control of low-temperature plasma technology. Therefore, this research result contribute to the further development of plasma process technology.