Presentation Information
[19p-P03-4]Nano-property control of GeSn thin films by RF sputtering and their application to Li ion batteries anode
〇Reon Yokoi1, Masayuki Ishihara1, Tomoki Omae1, Tomohisa nakada1, Ryoto Niwa1, Giichiro Uchida1 (1.Meijo Univ.)
Keywords:
Li ion battery,plasma sputtering
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