[19p-P03-1~5] 8.3 Plasma nanotechnology

[19p-P03-5] Deposition of sputtered GeSi composite nanoparticle films and their application to Li ion batteries anode

〇Tomohisa Nakada¹, Masayuki Ishihara¹, Tomoki Omae¹, Ryoto Niwa¹, Reon Yokoi¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

Li ion battery,sputtering