[19p-P05-1~33] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" (Poster)

[19p-P05-21] Characteristics of Zr-doped ZnO Thin Films Prepared by Reactive Sputtering

〇(M1C)kosuke Matsumoto¹, Ichiro Takano² (1.Grad School, Kogakuin Univ., 2.Kogakuin Univ.)

Keywords:

Transparent Conductive Film,semiconductor,Zinc Oxide

Transparent oxides with high electrical conductivity are used in a wide range of fields and have become indispensable materials for transparent electrodes. Indium tin oxide, which has both high light transmittance and electrical conductivity, is generally used as a material for transparent conductive films, but since indium is a rare metal and its supply is unstable, research on alternatives has been active. In this study, zirconium, which has a similar crystal structure and electronegativity to zinc oxide, was doped into the zinc oxide base, and its properties as a transparent conductive film were evaluated.