Presentation Information
[19p-P05-23]Metal induced crystallization using Al thin film for In-Ga-Zn-O thin-films
〇Yuki Nishimura1, Takanori Takahashi1, Hikaru Hoshikawa1, Yuto Kawato1, Yukiharu Uraoka1 (1.NAIST)
Keywords:
oxide semiconductor,metal induced crystallization
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