Presentation Information

[19p-P05-23]Metal induced crystallization using Al thin film for In-Ga-Zn-O thin-films

〇Yuki Nishimura1, Takanori Takahashi1, Hikaru Hoshikawa1, Yuto Kawato1, Yukiharu Uraoka1 (1.NAIST)

Keywords:

oxide semiconductor,metal induced crystallization


Comment

To browse or post comments, you must log in.Log in