[19p-P05-1~33] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" (Poster)

[19p-P05-26] Research on lowering the resistivity of SnO₂ transparent conductive films produced by a low-temperature magnetron sputtering process

〇(M1C)Non Fujimoto^1,3, Nobuto Oka¹, Tetsuaki Nishida², Junichi Nomoto³, Takashi Koida³ (1.Kindai Univ., 2.Environmental Materials Inst., 3.AIST.)

Keywords:

transparent conductive oxide,tin oxide,amorphous