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[19p-P05-8]Growth of ZnO nanoparticle-dispersed Ga2O3 thin films by mist CVD and their structural characterization

〇Takeshi Ohkutsu1, Kyosuke Tanaka1, Hina Saito1, Aoi Tamura1, Tetsuya Kouno1, Hiroko Kominami1, Kazuhiko Hara1,2,3 (1.Shizuoka Univ., 2.Medical photonics., 3.Elec.Res.inst.)
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Keywords:

gallium oxide,mist CVD


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