Presentation Information

[19p-P05-8]Growth of ZnO nanoparticle-dispersed Ga₂O₃thin films by mist CVD and their structural characterization

〇Takeshi Ohkutsu¹, Kyosuke Tanaka¹, Hina Saito¹, Aoi Tamura¹, Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara^1,2,3 (1.Shizuoka Univ., 2.Medical photonics., 3.Elec.Res.inst.)

Keywords:

gallium oxide,mist CVD

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Presentation Information

[19p-P05-8]Growth of ZnO nanoparticle-dispersed Ga2O3 thin films by mist CVD and their structural characterization

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[19p-P05-8]Growth of ZnO nanoparticle-dispersed Ga₂O₃thin films by mist CVD and their structural characterization