[20a-A22-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[20a-A22-8] Characterization of pressure response in a surface mount package ZnO pressure sensor

〇Haruyuki Endo¹, Takayuki Nihei¹, Kazuyuki Meguro¹, Hideki Oda¹, Yasube Kashiwaba² (1.Iwate Ind. Res. Inst., 2.Iwate Univ.)

Keywords:

ZnO,pressure sensor,piezoelectric device

We have studied pressure sensors using ZnO substrates for the application of cylinder pressure sensors in car engines. Previously, we proposed a high resistivity Mg_xZn_1-xO deposited ZnO piezoelectric sensor for the purpose of highering a sensor resistance and evaluated its effectiveness. However, we have not evaluated the pressure response at a high temperature. In this report, the fabrication of the surface mount package sensor and the pressure responsivity at a room temperature are described as the first step.