[20a-A24-1~9] 15.4 III-V-group nitride crystals

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[20a-A24-1] Study on reverse tapered mesa formation of GaN on lattice-matched AlInN

〇Takayoshi Oshima¹, Masataka Imura¹, Yuichi Oshima¹ (1.NIMS)

Keywords:

GaN,etching