[20a-A31-1~11] 17.3 Layered materials

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[20a-A31-5] Study on the generation of bubble structure depending on polymer stamp pressing conditions

〇(M1)Daichi Kokubo¹, Ayumi Shimizu¹, Kou Aoyagi¹, Hiroyuki Mogi¹, Yusuke Arashida¹, Shoji Yoshida¹, Osamu Takeuchi¹, Hidemi Shigekawa¹ (1.Univ. of Tsukuba)

Keywords:

transfer method,TMD,vacuum

Transition metal dichalcogenide (TMD) semiconductors can be repeatedly transferred to form multilayer structures, and physical properties have been extensively studied using these materials. On the other hand, air and impurities are trapped between the layers, resulting in a bubble structure, and inhomogeneity is a problem. This research aims to control the stamp angle by adding shape processing to the viscoelastic polymer stamp to achieve easy and uniform transfer. Furthermore, we will use a transfer mechanism in vacuum to suppress the bubble structure and discuss the effects of impurities.