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[20p-C42-4]The fabrication of AlGaN quantum well structure grown on bulk AlN substrate fabricated by solid phase epitaxy

〇Yoshinori Imoto1, Rintaro Miyake1, Ryoya Yamada1, Takumu Saito1, Shundai Maruyama1, Yusuke Sasaki1, Shogo Karino1, Sho Iwayama1, Satoshi Kamiyama1, Tetsuya Takeuchi1, Motoaki Iwaya1, Yosuke Sato2, Kyohei Atsuji2, Kentaro Nonaka2 (1.Meijo Univ., 2.NGK INSULATORS, LTD)
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Keywords:

Bulk AlN substrate,UV laser

the fabrication of bulk AlN substrate is reported recently. However, Any groups haven't reported the crystal quality and luminescence characteristics yet. In this report, we fabricated and evaluated AlGaN quantum wells on bulk AlN substrate. And also, we will report results that we processed that bulk AlN substrate to AlN nanopillars and fabricated the UV-B laser on that template.

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