[18p-A32-20~20] 8.6 Plasma Electronics English Session | The 85th JSAP Autumn Meeting 2024

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Oral presentation8 Plasma Electronics : 8.6 Plasma Electronics English Session

[18p-A32-20~20]8.6 Plasma Electronics English Session

Wed. Sep 18, 2024 6:45 PM - 7:00 PM JST
Wed. Sep 18, 2024 9:45 AM - 10:00 AM UTC

A32 (TOKI MESSE 3F)

Jun-Seok Oh(Osaka Metropolitan Univ.)

6:45 PM - 7:00 PM JST(9:45 AM - 10:00 AM UTC)English Presentation

[18p-A32-20]Investigation of Metal-Organic Plasma Enhanced Chemical Vapor Deposition for Yttrium Oxide film using a Microwave Excited Atmospheric Pressure Plasma Jet

〇(DC)Bat-Orgil Erdenezaya¹, Hirochika Uratani¹, Ruka Yazawa¹, Md. Shahiduzzaman¹, Tetsuya Taima¹, Yusuke Nakano¹, Yasunori Tanaka¹, Tatsuo Ishijima¹ (1.Kanazawa University)

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