Presentation Information
[22a-12G-4]Simulation of Atmospheric-Pressure Helium DC Glow Discharge with PIC/MCC Model
〇Fumiyoshi Tochikubo1, Yusuke Nakagawa1 (1.Tokyo Metropolitan Univ.)
Keywords:
atmospheric-pressure glow discharge,plasma simulation
In atmospheric pressure DC glow discharge, a type of stable atmospheric-pressure nonequilibrium plasma, ions are accelerated by the cathode sheath, however, the ion energy impinging on the cathode has not been stuided well. The increase in gas temperature due to Joule heating will also affects the ion energy. In this study, atmospheric-pressure He DC glow discharge was studied by the PIC/MCC model to evaluate the effect of discharge parameters such as applied voltage and Joule heating on the discharge structure, especially on ion energy.