[22a-12G-1~9] 8.1 Plasma production and diagnostics

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22a-12G-8] Electron temperature diagnosis of CF₄ / O₂ plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement

〇(DC)Yuya Yamashita^1,2, Kenta Doi³, Tetsuji Kiyota³, Shuhei Watanabe¹, Kazuki Shimatani¹, Wataru Kikuchi¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech, 2.JSPS DC, 3.ULVAC)

Keywords:

optical emission spectroscopic measurement,tomography,corona model

In this study, spectral emission coefficients of CF4 /O2 inductively coupled plasma were measured with a multichannel spectrometer with 34 lines of sight placed at the sides of the chamber. The horizontal distribution of spectral emission coefficients was obtained by spectral tomographic calculations based on a constrained regularization method. From the optical emission line spectra, the excited-level number densities of fluorine atoms 3 p^{4 4}D7/2^O and 3p^{2 2}P3/2^O were determined. The position distribution of electron temperature was diagnosed assuming corona equilibrium. The effect of chamber structure and equipment parameters on the position distribution of electron temperature is discussed.