[22a-12N-1~10] 7.3 Micro/Nano patterning and fabrication

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[22a-12N-9] Single-digit-nanometer measurement accuracy of thickness of transformed thin films to fluorescence intensity (2): Homology or similarity effect of polymerizable functional groups between monomer and adhesive agent in UV nanoimprinting

〇Ryota Inagawa¹, Akiko Onuma¹, Hiromasa Niinomi¹, Tomoya Oshikiri¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

Keywords:

UV nanoimprint,UV-curable liquid,fluorescence