The 71st JSAP Spring Meeting 2024
Advanced Search

Session Details

Oral presentation7 Beam Technology and Nanofabrication : 7.3 Micro/Nano patterning and fabrication

[22a-12N-1~10]7.3 Micro/Nano patterning and fabrication

Fri. Mar 22, 2024 9:00 AM - 11:45 AM JST
Fri. Mar 22, 2024 12:00 AM - 2:45 AM UTC
12N (Building No. 1)
Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)
9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[22a-12N-1]Compensations of Distortions and-Light Intensity Distributions in the Optics for Stereophonic Lithography Using a Pair of Paraboloid Mirrors

〇Toshiyuki Horiuchi1, Jun-ya Iwasaki1, Hiroshi Kobayashi1 (1.Tokyo Denki Univ.)
9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[22a-12N-2]Pattern formation by 3-Dimensional photolithography using built-in lens mask

Toshiaki Toshiaki1, Masaaki Masaaki1, Masaru Sasago1, 〇Yoshihiko Hirai1 (1.Osaka Metropolitan Univ.)
9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[22a-12N-3]Hybrid simulation of stochastic method and molecular dynamics of electron beam lithography for chemically amplified resists (2)

〇Hiroto Wakamatsu1, Daiki Nakamura1, Masaaki Yasuda1 (1.Osaka Met. Univ.)
9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[22a-12N-4]Development of Chemically Amplified Resist Assisted by Deep Learning

〇Chen Tang1, Tanaka Toshiaki2, Sekiguchi Atsushi2, Hirai Yoshihiko2, Yasuda Masaaki2 (1.Osaka Pref. Univ., 2.Osaka Metropolitan Univ.)
10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[22a-12N-5]Formation of Silicone Microcapsule Array Structures Encapsulating Ionic Liquids

〇Masayuki Okoshi1, Kaede Iwasaki1 (1.NDA)
10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[22a-12N-6]Repeated imprint using replica mold in UV nanoimprint process and fabrication of replica mold aiming for large area imprint

〇Risa Tanaka1, Ohsaki Takeshi1, Jun Taniguchi2 (1.Toyo Gosei, 2.Tokyo Univ. of Sci.)
10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[22a-12N-7]Investigation of transfer pattern profiles in thermal nanoimprint process

〇Hiroaki Kawata1, Rina Tsunetou1, Yoshihiko Hirai1, Hisao Kikuta1 (1.Osaka Metro. Univ.)
11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[22a-12N-8]Study on mold release process for tilted diffraction gratings for AR/VR Glasses using nanoimprinting

Yusei Kunitou1, Masaaki Yasuda1, 〇Yoshihiko Hirai1 (1.Osaka Metropolitan. Univ.)
11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[22a-12N-9]Single-digit-nanometer measurement accuracy of thickness of transformed thin films to fluorescence intensity (2): Homology or similarity effect of polymerizable functional groups between monomer and adhesive agent in UV nanoimprinting

〇Ryota Inagawa1, Akiko Onuma1, Hiromasa Niinomi1, Tomoya Oshikiri1, Masaru Nakagawa1 (1.IMRAM, Tohoku Univ.)
11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22a-12N-10]Periodicity control of trimming-induced wrinkled structures by adding cross-linker to UV-nanoimprint resist

〇Naoki Takano1, Hiromasa Niinomi1, Masaru Nakagawa1 (1.IMRAM, Tohoku Univ.)
Back to Category List