Presentation Information
[22a-P04-19]Hybrid integration technology of neural probes for neuroscience research
〇(M1)Gota Shinohara1, Wataru Oda1, Atsushi Nishikawa2, Alexander Loesing2, Hiroki Yasunaga1, Hiroto Sekiguchi1 (1.Toyohashi Tech, 2.ALLOS)
Keywords:
semiconductor device,MicroLED,Optogenetics
To understand the causal relationship between neural activity and behavior, it is important to manipulate and observe neural activity while experimental animals are free to act. In this study, we aimed to realize a MicroLED/neuroelectrode hybrid integrated probe, in which two probes are stacked so that a neural electrode is positioned directly above the LED. First, the MicroLED probe was made thinner by devising a process procedure to minimize damage to biological tissues caused by the probe thickness. Next, flip-chip bonding of the two probes was performed, and it was found that the probes could be bonded in parallel from the tip to the end.