[22p-11F-1~15] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22p-11F-12] Exploration of Optimal Deposition Conditions of Sb₂S₃ for Low-loss Optical Phase Shifters

〇(B)Tomohiro Anda¹, Yuto Miyatake¹, Kotaro Makino², Junji Tominaga², Noriyuki Miyata², Makoto Okano², Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.Tokyo Univ., 2.AIST)

Keywords:

phase change material,optical phase shifter

The application of phase change materials as phase shifters in optical circuits has been gaining attention in recent years. Sb₂S₃ has attracted much attention as a phase change material with low optical loss. However, the optical constants of Sb₂S₃ reported in previous studies vary widely, and their performance as phase shifters has not been fully evaluated. Therefore, we evaluated the relationship between the deposition conditions and the optical constants of Sb₂S₃, and fabricated and evaluated Sb₂S₃ optical phase shifters under the optimum deposition conditions.