[22p-11F-1~15] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[22p-11F-6] Silicon surface treatment by atmospheric linear type particle free plasma for fabrication of heterogeneous material integrated optical circuits

〇Koki Hihara¹, Junnosuke Furuya¹, Akane Yaida², Akitoshi Okino^1,2, Nobuhiko Nishiyama^1,2,3 (1.Tokyo Tech, 2.FIRST, Tokyo Tech, 3.PETRA)

Keywords:

Atmospheric plasma,Heterogeneous integration