Presentation Information
[22p-12N-3]Effect of interface shape on stress in multicrystalline Si crystal growth
〇Haruki Tajika1, Kentaro Kutsukake2, Takuto Kojima3, Xin Liu4, Hiroyuki Tanaka1, Noritaka Usami1,4,5 (1.Grad. Eng. Nagoya Univ., 2.AIP, RIKEN, 3.AIST, 4.IMaSS, Nagoya Univ, 5.InFuS, Nagoya Univ.)
Keywords:
crystal growth,Si,stress