[22p-13M-1~17] 3.15 Optics and Photonics English Session

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[22p-13M-9] Visualization of resonance features in MEMS resonators using stroboscopic differential interference contrast microscopy with enhanced temporal resolution

〇Qian Liu¹, Mirai Iimori¹, Ya Zhang¹ (1.Inst. of Eng., Tokyo Univ. of Agri. &Techno.)

Keywords:

microelectromechanical systems,differential interference contrast (DIC) microscopy,stroboscopic