講演情報

[22p-13M-9]Visualization of resonance features in MEMS resonators using stroboscopic differential interference contrast microscopy with enhanced temporal resolution

〇Qian Liu1, Mirai Iimori1, Ya Zhang1 (1.Inst. of Eng., Tokyo Univ. of Agri. &Techno.)

キーワード:

microelectromechanical systems、differential interference contrast (DIC) microscopy、stroboscopic