講演情報
[22p-13M-9]Visualization of resonance features in MEMS resonators using stroboscopic differential interference contrast microscopy with enhanced temporal resolution
〇Qian Liu1, Mirai Iimori1, Ya Zhang1 (1.Inst. of Eng., Tokyo Univ. of Agri. &Techno.)
キーワード:
microelectromechanical systems、differential interference contrast (DIC) microscopy、stroboscopic