Presentation Information
[22p-61B-5]Piezoelectric MEMS Ultrasonic Transducer Using LiNbO3
〇Seiji Umezawa1, Shinsuke Ikeuchi1, Yasuhiro Aida1 (1.Murata Manufacturing)
Keywords:
lithium niobate,piezoelectric,ultrasonic
Lithium niobate (LiNbO3) is an oxide material that possesses properties such as piezoelectricity, pyroelectricity, and nonlinear optical properties. Focusing on its piezoelectricity, we have been conducting research and development on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs), which are manufactured through microfabrication.
In this presentation, we will discuss experimental results and application examples of PMUT devices using either a single element (Fig. 1) or multiple elements.
In this presentation, we will discuss experimental results and application examples of PMUT devices using either a single element (Fig. 1) or multiple elements.