[22p-61B-1~7] Piezoelectric Device Applications of Oxide Materials

4:20 PM - 4:50 PM JST(7:20 AM - 7:50 AM UTC)

[22p-61B-6] Ferroelectric oxide piezoelectric epitaxial thin films for BAW filter applications

〇Takahiko Yanagitani^1,2,3,4 (1.Waseda University, 2.ZAIKEN, 3.JST-CREST, 4.JST-FOREST)

Keywords:

BAW filters,Piezoelectric thin films,Epitaxial films

BAW resonators based on epitaxial LiNbO_3, PbTiO_3, and MgZnO thin films are introduced.