[23a-12E-1~13] 1.6 Ultrasonics

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23a-12E-3] Direct evaluation of acoustic loss of free-standing oxide film measured by asynchronous optical sampling picosecond ultrasonics

〇(B)Hiroki Okita¹, Akira Nagakubo¹, Hirotsugu Ogi¹ (1.Osaka Univ. Eng.)

Keywords:

oxide film,sound velocity,acoustic loss

The acoustic properties of oxide film are very important for surface acoustic wave as temperature compensate film. However, it is difficult to directly measure them. Especially, acoustic loss of oxide film still remains unclear because of large energy loss to the substrate. In this study, we succeeded in direct measurement of sound velocity and acoustic loss for free-standing oxide film. This method allows us to evaluate the acoustic properties including loss for various dielectric film.