[23a-12H-1~11] 6.1 Ferroelectric thin films

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[23a-12H-4] Sputter Deposition of Single and Polycrystalline Composite PZT Thin Film Utilizing Area-Selective Wet Etching of Buffer Layer

〇(B)Yusaku Katagai¹, Akihiko Teshigahara¹, Shinya Yoshida¹ (1.Shibaura Univ.)

Keywords:

Piezoelectric micro ultrasonic transducers,Piezoelectric thin film

In the latest MEMS technology, piezoelectric single-crystals are attracting attention as a new transducer thin film. In particular, Pb(Zr,Ti)O3 (PZT) single-crystal thin films have potential for high-performance piezoelectric micro-ultrasonic transducers, but the brittleness of single crystals is a challenge. To address this issue, single-crystal and polycrystal composite thin films have been proposed, where the brittleness is improved by suppressing crack propagation with polycrystalline material. However, the manufacturing process so far has been complicated and has yield issues. In this study, we developed a new fabrication method for single-crystal and polycrystalline composite PZT thin films using a simpler wet etching process.