[23a-12H-1~11] 6.1 Ferroelectric thin films

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[23a-12H-9] Fabrication of BiFe_0.9Co_0.1O₃ nanodot array with electron-beam-lithographed HSQ mask

〇(B)Hajime Nakayama¹, Kota Yoshikawa¹, Koomok Lee¹, Manabu Yasui², Satoru Kaneko², Masahito Kurouchi², Kei Shigematsu^1,2,3, Masaki Azuma^1,2,3 (1.MSL Tokyo Tech., 2.KISTEC, 3.Sumitomo Chemical Research Cluster, Tokyo Tech.)

Keywords:

multiferroic,ferroelectric