[23a-12J-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[23a-12J-8] Individual Control of Quantum Dots for High Integrated 3D stacked silicon qubits

〇Daiki Futagi¹, Junoh Kim¹, Tomoko Mizutani¹, Takuya Saraya¹, Masaharu Kobayashi^1,2, Toshiro Hiramoto¹ (1.IIS, UTokyo., 2.d.lab, UTokyo)

Keywords:

Quantum Dots,Single Electron Transistor

In this study, we proposed a three-dimensional stacked silicon qubit device structure that can be highly integrated. Through TCAD simulations, we showed that the proposed device structure can control multiple quantum dots individually.