[23a-12K-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[23a-12K-5] Response Characteristics of Humidity Sensor Using Cellulose Nanofiber

〇Mutsuto Katoh^1,2, Toru Yahagi¹, Naoya Yamada¹, Shuji Tanaka² (1.Yamagata RIT, 2.Tohoku Univ.)

Keywords:

cellulose nanofiber,humidity sensor,impedance

The IDT type humidity sensor with cellulose nano fiber (CNF) as a sensitive membrane was developed by MEMS process. The electrostatic capacitance was observed by the Bode plot and the impedance was found to gradually approach a constant value as the humidity increased in the low frequency range. The CNF humidity sensor can measure a wide range of humidity by detecting impedance changes at the 1kHz frequency.