Presentation Information
[23a-13M-8]Laser processing of silicon with the third-harmonic of GHz burst pulses
〇Haruyuki Sakurai1, Kuniaki Konishi1 (1.The Univ. of Tokyo)
Keywords:
Laser Processing,GHz burst,microfabrication
Ultrashort GHz burst pulses has gained interest for its potential use in microfabrication applications. Such GHz burst processing has been extensively explored at fundamental wavelengths, but here we present results for processing with the third harmonics generated from GHz burst pulses. With these pulses, we microfabricate the surface of silicon, and find results with higher surface quality and less debris than with non-burst pulses. We then show how these conditions are particularly favorable for feedback monitored fabrication applications.